JPH0174547U - - Google Patents
Info
- Publication number
- JPH0174547U JPH0174547U JP1987169451U JP16945187U JPH0174547U JP H0174547 U JPH0174547 U JP H0174547U JP 1987169451 U JP1987169451 U JP 1987169451U JP 16945187 U JP16945187 U JP 16945187U JP H0174547 U JPH0174547 U JP H0174547U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- abnormality detection
- abnormality
- focused
- test object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005856 abnormality Effects 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169451U JPH0648399Y2 (ja) | 1987-11-05 | 1987-11-05 | 非接触微小表面異常検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987169451U JPH0648399Y2 (ja) | 1987-11-05 | 1987-11-05 | 非接触微小表面異常検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0174547U true JPH0174547U (en]) | 1989-05-19 |
| JPH0648399Y2 JPH0648399Y2 (ja) | 1994-12-12 |
Family
ID=31459520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987169451U Expired - Lifetime JPH0648399Y2 (ja) | 1987-11-05 | 1987-11-05 | 非接触微小表面異常検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648399Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62238445A (ja) * | 1986-04-10 | 1987-10-19 | Hitachi Electronics Eng Co Ltd | 表面検査装置 |
| JPS62245949A (ja) * | 1985-04-19 | 1987-10-27 | サイスキャン・システムズ・インク | 半導体ウエ−ハ走査装置及び方法 |
-
1987
- 1987-11-05 JP JP1987169451U patent/JPH0648399Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62245949A (ja) * | 1985-04-19 | 1987-10-27 | サイスキャン・システムズ・インク | 半導体ウエ−ハ走査装置及び方法 |
| JPS62238445A (ja) * | 1986-04-10 | 1987-10-19 | Hitachi Electronics Eng Co Ltd | 表面検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648399Y2 (ja) | 1994-12-12 |